摘要
为了保证整个光学系统的质量,对光学曲率半径的准确测量与检验至关重要。本文将机械球径仪法与光学投影法结合,采用光电图像法对矢高进行判读,经计算可以间接测得曲率半径,具体分析了被测元件边缘特征的准确性对矢高及曲率半径测量精度的影响。本文分别采用偏振成像与普通成像的方法进行了测量与对比,发现偏振图像具有更好的边缘细节特征,矢高测量精度也得到有效提升,光学曲率半径测量误差降低了0.5%以上。结果表明,偏振成像的方法在光学曲率半径测量中具有重要的应用价值。
In order to ensure the quality of whole optical system,it is important to measure and check the optical curvature radius accurately.The method of mechanical spherometer and the method of optical projection were combined,and the photoelectric image method was used to measure the vector height,then the radius could be calculated indirectly.The influence caused by edge error of measured element on the accuracy of the vector height and curvature radius was analyzed.Polarization imaging and general imaging were used to measure the height and compare the results,and it is found that polarization images can have better edge details,the accuracy of the vector height was effectively improved,and the error of the optical curvature radius was reduced by more than 0.5%.The results show that the method of polarization imaging has important application value in measuring the optical curvature radius.
作者
刘智颖
肖升哲
秦天翔
LIU Zhiying;XIAO Shengzhe;QIN Tianxiang(Key Laboratory of Optoelectric Measurement and Optical Information Transmission Technology,Ministry of Education,School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,China)
出处
《应用光学》
CAS
CSCD
北大核心
2021年第1期95-103,共9页
Journal of Applied Optics
基金
国家自然科学基金(61805025)
国家重点研发计划(2016YFF0101902)。
关键词
光学曲率半径
矢高
弦长
偏振成像
普通成像
optical curvature radius
vector height
chord length
polarization imaging
general imaging
