摘要
碱金属原子气室是陀螺仪、磁力计和原子钟等原子传感器的核心部件。利用微机电系统(MEMS)技术实现微型化,是当今原子气室的重要发展方向。这些技术包括激光加工、超声波加工、湿法化学腐蚀、深反应离子刻蚀等硅孔成型技术,直接键合、共晶键合、粘结键合和阳极键合等基片键合技术,以及单质填充、原位化学反应、叠氮化物光分解、电化学分解释放和激光剥离蜡封包等碱金属填充技术。回顾了相关技术发展并分析了各自的优劣。
Alkali metal vapor cell is the core component for atomic sensor such as gyroscope,magnetometer and atomic clock.Miniaturization is an important developing direction for modern alkali metal vapor cells by using micro-electro-mechanical system(MEMS)technology.These technologies including laser punching,ultrasonic milling,wet chemical etching and deep reactive ion etching for silicon through hole formation;direct bonding,eutectic bonding,adhesive bonding and anodic bonding for wafer bonding;direct filling,in-situ chemical reaction,UV decomposition of alkali metal azides,laser ablation of wax micro-packet,and electrolytic decomposition of alkali metal-enriched glass for alkali metal filling,etc.Relative technologies are reviewed and their advantages and disadvantages are analyzed.
作者
李兴辉
杜婷
韩攀阳
陈海军
蔡军
冯进军
LI Xinghui;DU Ting;HAN Panyang;CHEN Haijun;CAI Jun;FENG Jinjun(National Key Laboratory of Science and Technology on Vacuum Electronics,Beijing Vacuum Electronics Research Institute,Beijing 100015,China)
出处
《传感器与微系统》
CSCD
北大核心
2021年第3期1-4,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金重点资助项目(61831001)
国家重点研发计划资助项目(2017YFC0109102)。
关键词
碱金属
原子气室
微机电系统(MEMS)
阳极键合
alkali metal
atom vapor cell
micro-electro-mechanical system(MEMS)
anode bonding
