摘要
由于TiAlCrN涂层相比较于TiAlN等其它涂层有更加优异的性能,在工业生产中有着更加广泛的应用,文章介绍TiAlCrN涂层制备的方式方法,阐述了基体选择、靶材选择、N2分压、衬底偏压、沉积温度等工艺参数对于涂层性能的影响,分析Ti、Al、Cr、N元素含量对于涂层性能的改变以及作用机理,讨论涂层的耐腐蚀性能和抗高温氧化性能,并展望TiAlCrN涂层的发展方向。
Compared with other coatings such as TiAlrN,TiAlCrN coating has more excellent performance and has more extensive applications in industrial production.The article introduces the methods and methods of TiAlCrN coating preparation,and describes the substrate selection,target selection,and N2 partial pressure.Influence of process parameters such as substrate bias voltage and deposition temperature on coating performance,analyze the changes of Ti,Al,Cr,N element content on coating performance and the mechanism of action,discuss the corrosion resistance and high temperature oxidation resistance of the coating And look forward to the development direction of TiAlCrN coatings.
作者
付泽钰
王天国
FU Ze-yu;WANG Tian-guo(Hubei University of Automotive Technology,Shiyan 442000,China)
出处
《世界有色金属》
2021年第1期176-177,共2页
World Nonferrous Metals