摘要
In order to prove that the Te-based glass frit could be applied to Ag pastes to fabricate Ag electrode and elucidate the reactions among Ag,the frit,and the Si wafer,the Te-based glass and Ag pastes with different contents of glass frit(0 wt%,1 wt%,3 wt%,5 wt%,and 7 wt%)were prepared.The microstructures of Ag electrodes and the phase analysis of interface between Ag electrodes and the Si wafer were investigated using scanning electron microscopy(SEM)coupled with energy-dispersive X-ray spectroscopy(EDX)and X-ray diffraction(XRD).When the content of glass frit is 3 wt%,the Ag electrode has good adhesion with Si wafer.What’s more,Ag crystallites and metallic Te could be found on the Si wafer.These results suggest that the TeO_(2) in the glass frit could react with SiNx anti-reflecting coating(ARC)and Si to serve as a medium for forming Ag crystallites.
基金
financially supported by the Guangdong Province University-Industry Cooperation Projects(No.2011B090400238)
the Priority Academic Program Development of Jiangsu Higher Education Institutions(PAPD)。