摘要
针对气浮工作台运行中出现的气膜波动问题,研究空气静压轴承的不同气腔结构形状对气膜内气旋及气膜波动的影响。通过结合承载力和刚度等性能参数,对有限元仿真不同形状气腔的结果对比分析,得到矩形气腔刚度最大,但同时气旋现象严重,圆台气腔能有效抑制气旋现象。这些分析通过改变轴承的结构参数抑制空气静压轴承的气旋及气膜波动,为提高气浮工作台的加工精度和稳定性提供理论依据。
Aiming at the problem of gas film fluctuations during the operation of the air floating table,the effects of different air cavity structure shapes of air static pressure bearings on the cyclone and gas film fluctuations in the air film is studied.By combining performance parameters such as bearing capacity and stiffness,the results offinite element simulation of different shapes of air cavities are compared and analyzed.It is found that the rectangular air cavity has the largest stiffness,but the cyclone phenomenon is serious.The circular table air cavity can effectively suppress the cyclone phenomenon.These analyses restrain the cyclones and the fluctuation of the air film of the aerostatic bearing from the structural parameters of the bearing,and provide the theoretical basis for improving the stability and machining accuracy of the air flotation table.
作者
陈东菊
程锴
董丽华
潘日
范晋伟
CHEN Dongju;CHENG Kai;DONG Lihua;PAN Ri;FAN Jinwei(Mechanical Industry Key Laboratory of Heavy Machine Tool Digital Design and Testing,Beijing University of Technology,Beijing 100124,CHN)
出处
《制造技术与机床》
北大核心
2021年第5期128-133,共6页
Manufacturing Technology & Machine Tool
基金
国家自然科学基金资助项目(51875005,51475010)。
关键词
空气静压轴承
气旋现象
气膜波动
加工精度
aerostatic bearing
cyclonic phenomena
gas film fluctuation
machining accuracy
