摘要
电镀金刚石线锯广泛用于单晶硅、蓝宝石、单晶碳化硅、陶瓷等硬脆性材料的切片加工领域,其表面磨粒分布密度直接影响其切片加工性能。用4台CCD相机采集金刚石线锯表面图像,对图像进行高斯滤波预处理,并基于柱面模型将图像展开,以图像中磨粒重心为特征点,通过特征点匹配及筛选、配准模型求解、图像重采样、图像重合区域去除等方法完成图像拼接,得到金刚石线锯全圆柱表面图像,再利用连通域查找提取金刚石线锯全圆柱表面图像内的磨粒数量。结果表明:提出的金刚石线锯全表面图像磨粒分布密度检测方法能提高其磨粒分布密度在线检测精度,与单相机检测的半表面图像结果相比,其磨粒分布密度检测结果的最大相对误差下降29.6%,平均值相对误差下降17.3%。
Electroplated diamond wire saw is widely used in slicing of hard and brittle materials,such as monocrystalline silicon,sapphire,single crystal silicon carbide,and ceramics.The abrasive distribution density on the surface of electroplated diamond wire saw will directly affect its slicing performance,which is the main index of diamond wire saw quality inspection.Four CCD cameras were used to acquire the surface images of diamond wire saw at the same time,and the images were preprocessed by Gaussian filter.The images were expanded based on the cylindrical model,and the image mosaic was completed through the steps of feature point matching,feature point screening,registration model solving,image resampling,and image overlapping area removal.Then the number of abrasives in the whole image was extracted by using the connected region labeling.The results show that the proposed method for detecting the abrasive particle distribution density of the full-surface image of the electroplated diamond wire saw can improve the accuracy of the online detection of the abrasive particle distribution density.Compared with the half surface image results detected by a single camera,the maximum relative error of the detection results of the abrasive distribution density decreases by 29.6%,and the average relative error decreases by 17.3%.
作者
赵玉康
毕文波
葛培琪
ZHAO Yukang;BI Wenbo;GE Peiqi(School of Mechanical Engineering, Shandong University, Jinan 250061, China;Key Laboratory of High Efficiency and Clean Mechanical Manufacture of Ministry of Education, Shandong University, Jinan 250061, China)
出处
《金刚石与磨料磨具工程》
CAS
北大核心
2021年第2期64-68,共5页
Diamond & Abrasives Engineering
基金
山东省重大科技创新工程项目(2019JZZY020209)。
关键词
机器视觉
金刚石线锯
图像拼接
磨粒分布密度
machine vision
diamond wire saw
image mosaic
abrasive distribution density
