摘要
基于气囊抛光技术和工业机器人平台开发光学元件精密抛光系统,既能满足光学元件快速抛光环节的高效率和高精度的要求,又可以降低开发成本,是极具潜力的抛光设备开发方案。气囊抛光具有稳定的且确定的材料去除特性,通常要求抛光斑稳定性在90%左右。针对机器人气囊抛光系统在多步离散进动抛光过程中机器人末端刚度对气囊抛光稳定性的影响展开研究,通过建立机器人末端刚度矩阵,获得机器人末端变形;基于Preston理论,建立含变形误差的气囊抛光去除函数。最后设计4步离散定点抛光实验验证机器人气囊抛光系统稳定性。根据结果可知抛光斑在XY截面轮廓线上皆呈类高斯形状,且XY截面轮廓线基本一致,具有比较好的重合度;对比不同抛光位置的截面轮廓线,其相对误差小于5%,由此可验证机器人气囊抛光系统在离散进动抛光时具有较好的稳定性。
Precision polishing system for opticals based on bonnet polishing technology and industrial robot can not only meet the requirements of high efficiency and precision of rapid polishing,but also reduce the development cost,thus it is a potential development solution for polishing.Bonnet polishing requires stable and deterministic material removal characteristics,and the stability of polishing spot is usually around 90%.The influence of robot stiffness on the stability of robot bonnet polishing system in the process of multi-step discrete precession polishing was studied.The robot end deformation was analyzed by the stiffness matrix,and the removal function of bonnet polishing with deformation error was established based on Preston theory.Finally,a four-step discrete polishing experiment was designed.According to the results,the polishing spot was Gaussian on the xy section contour line,and the xy section contour line was basically the same,with a good coincidence degree.Comparison of the cross-section profiles at different polishing positions indicates,the relative errors are below 5%.The experiment proves that the robot bonnet polishing system has a good stability in discrete precast polishing.
作者
林泽文
王振忠
黄雪鹏
孔刘伟
Lin Zewen;Wang Zhenzhong;Huang Xuepeng;Kong Liuwei(Xiamen University,Xiamen 361005,China;Shenzhen Research Institute of Xiamen University,Shenzhen 518057,China)
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2021年第5期20-28,共9页
High Power Laser and Particle Beams
基金
深圳科技计划项目(JCYJ2018030617)。
关键词
气囊抛光
工业机器人
刚度矩阵
去除函数
抛光实验
bonnet polishing
industrial robot
stiffness matrix
removal function
polishing experiment
