摘要
微机电系统内部存在微尺度流动现象,伴随微机电系统出现的微流量系统目前已广泛应用于气体微流控领域。研究微通道气体流动特性能够为微机械结构设计提供理论指导。在对气体流动尺度划分分析的基础上,阐述了各尺度流动特征及流动模型。重点调研了国内外微直通道和非直通道中充分发展段及进出口区域气体流动阻力特性,并对微尺度流场可视化实验方法中的显微粒子图像测速技术和流场特性研究进行了总结。分析了当前微尺度气体流动特性研究现状,指出进一步开展对微通道进出口气体阻力、非直通道流动特性及非稳态流动特性的研究有助于微机械结构设计优化,拓宽其应用范围。
Micro Electronics Mechanical Systems involving micro-channels flows have been widely used in microflow control application.Investigation on micro-channel flow characteristics can provide instructions for designing micro mechanical systems.On the basis of gaseous flow scale classification,we discuss the flow characteristics and flow models in different scales.In this paper,we focus on the friction characteristics in fully developed region,inlet and outlet region in both straight and non-straight micro-channel.The micro-scale particle image velocimetry technique and study on flow filed features are summarized.Based on the analysis of present work on micro-channel flow,we conclude that further investigation on friction characteristics in inlet and outlet region,flow characteristics in non-straight micro-channel and unsteady flow characteristics may facilitate the optimization of micro mechanical design and extended application.
作者
赵继鹏
徐涛
杨兵
ZHAO Jipeng;XU Tao;YANG Bing(Lanzhou Institute of Physics,Lanzhou 730000,China)
出处
《真空与低温》
2021年第3期296-302,共7页
Vacuum and Cryogenics
关键词
微通道流动
阻力特性
显微粒子图像测速
流场特性
micro-channel flow
friction characteristics
micro-scale particle image velocimetry
flow features
