摘要
采用一种仿真优化驻留时间分布和修形工艺的方法。通过在离子源出光口处添加光阑来改变离子束的束形,在MATLAB软件上模拟不同光阑尺寸的离子束并按照不同的叠加间距对其进行修形仿真。仿真过程中,引入修正法来获得驻留时间分布和去除面形残差分布并分析其去除规律,从而确定最佳的光阑尺寸、叠加间距和驻留时间分布。融石英平面的初始面形峰谷值为1079.59nm,方均根值为304.95nm,直径为120mm,在模拟仿真的基础上对其进行修形。经13h修形后,面形的精度峰谷值提高到95.62nm,方均根值提高到8.99nm,面形的方均根值收敛比达到33.92。
A simulation method is used to optimize the residence time distribution and modification process.The beam shape of the ion beam is changed by adding an diaphragm at the light exit of the ion source.Ion beams with different apertures are simulated on MATLAB software and the ion beam is modified according to different stacking intervals.In the simulation process,we introduce a correction method to obtain the residence time distribution and residual distribution of the surface shape remaining after the removal of material.We analyze the removal rules to determine the best aperture size,stacking interval,and residencetime distribution.The initial peak and valley value of the fused silica plane is 1079.59 nm,the root mean square value is 304.95 nm,and the diameter is 120 mm.The shape is modified on the basis of simulation.We modify the surface shape on the basis of the simulations.After13 hof modification,the peak-to-valley accuracy of the surface profile is improved to 95.62 nm,RMS value is improved to 8.99 nm,and RMS value of the convergence ratio of the surface profile is 33.92.
作者
康乐
蒋世磊
孙国斌
张余豪
刘卫国
Kang Le;Jiang Shilei;Sun Guobin;Zhang Yuhao;Liu Weiguo(School of Optoelectronic Engineering,Xi′an Technological University,Xi′an,Shaanxi 710021,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2021年第8期180-188,共9页
Laser & Optoelectronics Progress
基金
陕西省教育厅重点实验室科研计划(18JS053)。
关键词
图像处理
离子束修形
光阑
叠加间距
修正法
image processing
ion beam shape modification
diaphragm
superimposed spacing
correction method
