摘要
研究钼添加对CrN涂层微观结构和抗氧化性能的影响,采用反应磁控溅射法在硅片和高速钢片上制备不同Mo含量的Cr-Mo-N涂层,并在500~800℃的高温空气中退火1 h,用X射线衍射(XRD)、拉曼光谱和扫描电子显微镜(SEM)对涂层退火前后的微观形貌进行表征。沉积的CrN和Cr-Mo-N涂层均表现出基于CrN晶格的B1面心立方相(fcc)。Mo离子取代CrN晶格中的Cr离子,形成CrMo-N固溶体。在600℃时,XRD和拉曼光谱表明,Mo含量较高的Cr-Mo-N涂层中形成MoO3相,表面较粗糙,含氧量较高。在700℃时,CrN涂层由于内应力的作用,其横截面形貌为疏松的柱状晶,并有一定的多孔区,而Cr-Mo-N涂层则为致密的柱状晶结构。低Mo含量(<17at%)的Cr-Mo-N涂层比Cr N涂层具有更好的抗氧化性。
To investigate the effect of molybdenum(Mo)addition on microstructure and oxidation resistance of CrN coating,Cr-MoN coatings with different Mo contents were fabricated on silicon wafers and high speed steel by reactive magnetron sputtering and annealed at elevated temperatures from 500℃to 800℃in air for 1 h.The coatings before and after annealing were characterized by Xray diffraction(XRD),Raman spectroscopy and scanning electron microscope(SEM).The results show that the as-deposited CrN and Cr-Mo-N coatings all exhibit B1 face-centered cubic(fee)phase based on the CrN lattice.Mo ions substitute for Cr ions in Cr-N lattice,forming the solid solution Cr-Mo-N coatings.At 600℃,XRD and Raman spectra show that the MoO3 phase forms in Cr-Mo-N coatings with higher Mo contents,indicating a coarser surface with higher oxygen content.At 700℃,the cross sectional morphology of the CrN coating exhibits loose columnar grains with some porous regions due to the internal stress while the Cr-Mo-N coating shows the dense columnar structure.This study reveals that the Cr-Mo-N coatings with lower Mo contents(<17 at%)have better oxidation re sistance than the CrN coating does.
作者
齐东丽
陈建金
刘俊
吕伟
宋健宇
沈龙海
Qi Dongli;Chen Jianjin;Liu Jun;Lv Wei;Song Jianyu;Shen Longhai(School of Science,Shenyang Ligong University,Shenyang 110159,China)
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2021年第5期1505-1512,共8页
Rare Metal Materials and Engineering
基金
Natural Science Foundation Guidance Plan Project of Liaoning(2019-ZD-0254)。
