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加工参数对单晶锗表面粗糙度扇形分布的研究 被引量:1

Study on the Sector Distribution of Single Crystal Germanium Surface Roughness by Machining Parameters
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摘要 单点金刚石车削单晶锗端面时,其表面粗糙度易呈现明暗扇形域相间分布的现象,达不到使用标准,而该现象的出现与加工参数密切相关。通过正交试验,研究了刀尖圆弧半径、切削深度、进给量对单晶锗表面明暗域粗糙度扇形分布的影响。将数据进行方差和极差分析,结果表明:刀尖圆弧半径、切削深度、进给量,对单晶锗表面粗糙度明暗扇形分布都有影响,进给量对其影响显著,而刀尖圆弧半径和切削深度对其影响较显著;刀尖圆弧半径与明暗扇形域粗糙度值成反比,进给量与明暗扇形域粗糙度值成正比;刀尖圆弧半径越小、切削深度越大、进给量越大,暗扇形域面积越大,明扇形域面积越小;将单晶锗表面明暗扇形域用扫描电镜观察,发现明扇形域表面光滑,主要发生塑性去除,暗扇形域出现较多凹坑,主要发生脆性破坏。根据极差分析,针对本试验,选出了一组最优加工方案为A3B1C1,即刀尖圆弧半径为2 mm,切削深度为2μm,进给量为1μm/r。此结果可为实际加工做出一定参考。 When single point diamond turning single crystal germanium end face,its surface roughness is easy to appear the phenomenon of bright and dark sector distribution,which difficult to meet the usage standard,while the appearance of this phenomenon is closely related to the machining parameters.Therefore,the influence of tool tip radius,cutting depth and feed rate on the fan-shaped distribution of surface roughness in bright and dark regions of single crystal germanium are studied by orthogonal experiment.Through variance and range analysis,the following conclusions are drawn:tool tip arc radius,cutting depth and feed rate all have an impact on the distribution of bright and dark fan-shaped surface roughness,feed rate has a particularly significant impact on it,while the tool tip arc radius and cutting depth have a significant impact on it;the tool tip arc radius is inversely proportional to the roughness value of the bright and dark sector region,and the feed rate is the coarseness of the bright and dark sector area.The results show that the surface of the bright sector is smooth,the plastic removal is mainly occurred,and there are many pits in the dark sector,and the main brittle failure occurs.According to the range analysis,a group of optimal machining schemes are selected as A3B1C1,that is,the arc radius of tool tip is 2 mm,the cutting depth is 2μm and the feed rate is 1μm/r.For the actual processing to do some reference.
作者 杨晓京 杨红秀 肖建国 李茂忠 康杰 YANG Xiaojing;YANG Hongxiu;XIAO Jianguo;LI Maozhong;KANG Jie(Faculty of Mechanical and Electrical Engineering,Kunming University of Science and Technology,Kunming 650500,China)
出处 《有色金属工程》 CAS 北大核心 2021年第7期39-45,共7页 Nonferrous Metals Engineering
基金 国家自然科学基金资助项目(51765027)。
关键词 单晶锗 粗糙度扇形分布 正交试验 方差分析 极差分析 single crystal germanium sector distribution of roughness orthogonal test variance analysis range analysis
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