摘要
We demonstrate the fabrication of ultrahigh quality(Q) factor silica microdisk resonators on a silicon chip by inductively coupled plasma(ICP) etching. We achieve a dry-etched optical microresonator with an intrinsic Q factor as high as 1.94×10^(8) from a 1-mm-diameter silica microdisk with a thickness of 4 μm. Our work provides a chip-based microresonator platform operating in the ultrahigh-Q region that will be useful in nonlinear photonics such as Brillouin lasers and Kerr microcombs.
基金
National Key Research and Development Program of China(2016YFA0302500,2017YFA0303703)
National Natural Science Foundation of China(NFSC)(61922040,11621091)
Fundamental Research Funds for the Central Universities(021314380149)。
