摘要
针对零差正交干涉测量应用于超低频超大振幅标准振动台性能测试时非正交相移误差补偿困难、所需采样率极高的问题,提出了一种欠采样零差正交激光干涉测振方法。在设计消偏振分光测量光路的基础上,提出波片偏航调整方法,进行非正交相移误差的硬件实时补偿;提出基于运动状态预估的卡尔曼正交信号解调算法,对深度欠采样的干涉条纹进行相位信号解调,以大幅降低所需的采样率及产生的数据量。实验和仿真结果表明,文中方法可大幅降低零差正交干涉的非正交相移误差及其对波片角度偏差的灵敏度,且在测量超低频振动时,卡尔曼正交信号解调算法所需的采样率和每通道数据采集点数降低至奈奎斯特采样定理的0.056%。文中提出的欠采样零差正交激光干涉测振方法较好地满足超低频超大振幅标准振动测试的需求。
In order to carry out performance testing of ultra-low frequency standard vibration table with large amplitude,an undersampling homodyne quadrature laser interferometry measurement method was proposed in this paper.Based on the design of depolarization beam splitting measurement optical path,a wave plate yaw adjustment method was proposed to compensate hardware of the quadrature phase error in real time.The Kalman quadrature signal demodulation algorithm based on motion state estimation was presented to demodulate the interference fringes of deep undersampling to reduce the sampling rate and the amount of data produced.The experimental and simulation results show that the quadrature phase error and its sensitivity to the angle deviations of wave plates are significantly reduced,the sampling rate of the Kalman quadrature signal demodulation algorithm and number of samples per channel are reduced to 0.056%of Nyquist sampling theorem for measuring ultra-low frequency vibration.The undersampling homodyne quadrature laser interferometry measurement method proposed in this paper can meet the requirements of ultra low frequency and ultra large amplitude standard vibration measurement.
作者
崔俊宁
李伟
边星元
朱刚
何张强
邹丽敏
Cui Junning;Li Wei;Bian Xingyuan;Zhu Gang;He Zhangqiang;Zou Limin(Center of Ultra-Precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China;Key Lab of Ultra-precision Intelligent Instrumentation(Harbin Institute of Technology),Ministry of Industry and Information Technology,Harbin 150080,China;Beijing Aerospace Institute for Metrology and Measurement Technology,Beijing 100076,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2021年第6期217-224,共8页
Infrared and Laser Engineering
基金
国家自然科学基金(51675139,L1924059)
中央高校基本科研业务费专项资金。
关键词
零差正交干涉测振方法
非正交相移误差
欠采样
卡尔曼正交信号解调
振动校准
homodyne quadrature laser interferometry measurement method
quadrature phase error
undersampling
Kalman quadrature signal demodulation
vibration calibration
