摘要
针对氧化物半导体气体传感器检测低体积分数气体信号弱的问题,提出了利用场效应晶体管(FET)放大弱电压信号的方法。将FET与负载电阻串接形成新负载,具有新负载电阻随电压变化的功能,将弱电压信号放大。结果表明:将放大后的信号折算成气体传感器的表观灵敏度,是原气体传感器真实灵敏度的4~11倍,且放大倍数随测量电压的增大而增大。利用FET的特性曲线对放大原理及放大倍数进行了模拟计算,并制作了以甲苯为当量的总挥发性有机物(TVOCs)测试仪。其在空气净化器打开前后,较准确地反映了TVOCs的变化趋势,并分析了误差的来源。
To solve the problem of weak signal to low volume fraction gases,field effect transistors(FETs)are adopted to amplify the signal of metal oxide gas sensors.FET is connected with the load resistor to form a new load,the total resistance of which is variable with the gate voltage of the FET,and thus amplifies the signal.The results show that the sensitivity is enhanced by 4~11 times,which is found to increase with the elevated measuring voltage.Simulated calculation of magnification mechanism and magnification factor are carried out using characteristic curves of the FET,and a toluene equivalent total volatile organic compounds(TVOCs)detector is developed.The detector shows variation trend of TVOCs accurately before and after an air purifier is opened,and source of error is analyzed.
作者
边毓智
谢政
王展
姜风
韩宁
陈运法
BIAN Yuzhi;XIE Zheng;WANG Zhan;JIANG Feng;HAN Ning;CHEN Yunfa(State Key Laboratory of Multiphase Complex Systems,Institute of Process Engineering,Chinese Academy of Sciences,Beijing 100190,China;College of Chemical Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;Beijing Yadu Environmental Technology Company Limited,Beijing 100084,China)
出处
《传感器与微系统》
CSCD
北大核心
2021年第9期18-21,共4页
Transducer and Microsystem Technologies
基金
国家重点研发计划资助项目(2016YFC0207100)。
关键词
场效应晶体管
氧化物半导体气体传感器
信号放大
测量电压
field-effect transistor(FET)
metal oxide semiconductor gas sensor
signal amplification
measuring voltage
