摘要
锗窗是红外热成像系统的一个关键光学元件,随着热成像技术的发展,对锗窗的面形精度要求越来越高。传统胶盘上盘抛光技术,因粘接力导致锗窗下盘后发生变形,限制了锗窗面形精度的进一步提高。介绍了一种采用夹模上盘抛光锗窗的方法,夹模上盘依靠机械限位,将锗窗镶嵌到夹模中进行抛光,上盘时不需要任何粘接剂,从根本上避免了粘接上盘时锗窗所受的粘接力影响。与传统胶盘上盘抛光技术相比,夹模上盘减小了盘上、盘下锗窗面形的变化,缩短了上盘、下盘的时间,提高了加工效率。结果表明,对尺寸∅90 mm×5 mm、镀膜完工面形精度PV≤0.5λ(λ=632.8 nm)的锗窗,抛光下盘后面形PV值的平均变化量小于0.1光圈,这为镀膜完工后锗窗面形精度满足要求起着重要作用。
Germanium window was a key optical element of infrared thermal imaging system.With the development of thermal imaging technology,the requirements of germanium window surface shape accuracy have been becoming stricter than that of before.Due to the adhesive force of glue,the traditional polishing technology led to gluing the parts to the plate,which caused the deformation after removing the parts from the plate and limited the further improvement of the surface shape accuracy of germanium window.Thus,a method of polishing germanium window with clamping die was introduced.Depending on the mechanical limit rather than the effect of adhesive,the germanium window was inlaid into the clamping die for polishing,which fundamentally avoided the influence of adhesive force to the germanium window.Compared with the traditional polishing technology,clamping die method reduced the variation of germanium window surface shape,shortened the time of fixing parts and removing parts,and improved the machining efficiency.The results showed that for the window with the dimension size of∅90 mm×5 mm and surface precision of PV≤0.5λ(λ=632.8 nm)after coating,the average variation of PV value was less than 0.1 fringe after removing it from the plate,which played an important role in meeting the requirements of the surface precision for the germanium window after coating.
作者
谢启明
耿朝红
尹国良
应常宇
李林涛
李祥芬
XIE Qiming;GENG Chaohong;YIN Guoliang;YING Changyu;LI Lintao;LI Xiangfen(Yunnan KIRO-CH Photonics Co.,Ltd.,Kunming 650217,China;Kunming Physics of Institute,Kunming 650223,China)
出处
《新技术新工艺》
2021年第8期18-22,共5页
New Technology & New Process
关键词
夹模
变形
抛光
锗窗
热成像技术
面形精度
clamping die
deformation
polishing
germanium window
thermal imaging technology
surface shape accuracy
