摘要
为了满足现代工业领域中对复杂结构产品的高精度多自由度测量需求,构建了多自由度联合采集系统模型。建立了宽谱段相移干涉多自由度采集系统模型,并对系统中的光学部件进行了设计;以相移干涉技术为基础,提出了多自由度联合测量算法,并分析验证了所设计系统的合理性;根据仪器的物理和光学参数对算法进行了具体实现,基于Simulink的仿真试验结果表明:深度测量精度在μm级,测量范围在m级;光谱检测分辨率在nm级,测量带宽300 nm,覆盖整个可见光区域,光谱准确度为0.2 nm,误差率小于0.1%。该系统满足了现代工业精密测量中高深度分辨率、宽深度测量范围、高光谱准确度、高光谱分辨率的要求。
To realize high-precision detection of complex products in modern industrial field,a model of multi-degree of freedom joint acquisition system was established.A model of multi-degree of freedom acquisition system based on wide-spectrum phase-shifting interferometry was established,and the optical components in the system were designed.A multi-degree of freedom joint measuring algorithm was proposed based on phase-shifting interferometry,and rationality of the system was verified.The algorithm was implemented by physical and optical parameters.The results based on Simulink show that depth measurement accuracy is at the micron level,and measurement range is at the meter level;spectrum detection resolution is at the nanometer level,the measuring bandwidth is 300 nm,which covers the entire visible light area,and spectrum accuracy is 0.2 nm,error rate is less than 0.1%.The system meets the needs of high depth resolution,wide depth measuring range,high spectrum accuracy and high spectral resolution in modern industrial precision measurement.
作者
蔡娅雯
张庆君
刘杰
张玥
刘久利
CAI Yawen;ZHANG Qingjun;LIU Jie;ZHANG Yue;LIU Jiuli(Institute of Remote Sensing Satellite,China Academy of Space Technology,Beijing 100084,China)
出处
《应用光学》
CAS
CSCD
北大核心
2021年第5期775-781,共7页
Journal of Applied Optics
基金
十三五航天预研基金(D010102)。
关键词
相移干涉
精密测量
深度采集
光谱采集
phase-shifting interferometry
precision measurement
depth acquisition
spectrum acquisition
