摘要
随着微系统技术向三维立体集成不断发展,Interposer技术逐渐成为关注的焦点,是未来电子系统小型化和多功能化的重要技术途径,具有广阔的应用市场和发展前景。关于Interposer的测试技术研究也提上发展日程。对目前Interposer测试技术的研究现状和发展趋势进行了综述,重点总结了研究机构在Interposer测试技术领域的研究现状,并对技术发展趋势做了简单展望。
With the development of microsystem technology towards 3D integration,Interposer technology has become the focus of research.It is an important technology roadmap of miniaturization and multi-function of electronic systems in future,with wide market in application and prospective development.Research on the Interposer test technology is also put on the development agenda.This article gives a brief description of current status and development trend of Interposer test technology,especially focusing on the research and development by institutes.Furthermore,there is brief prospective on Interposer test technology development.
作者
秦贺
武昊男
魏晓飞
李晓龙
冯长磊
QIN He;WU Haonan;WEI Xiaofei;LI Xiaolong;FENG Changlei(Beijing Microelectronics Technology Institute,Beijing 100076,China)
出处
《遥测遥控》
2021年第5期63-69,共7页
Journal of Telemetry,Tracking and Command
