摘要
采用磁控溅射方法制备FeCoV薄膜作为电流传感器中的磁敏材料。采用应变片法测量了FeCoV合金的磁致伸缩曲线,其饱和磁致伸缩系数约97×10^(-6);扫描电镜观察发现FeCoV薄膜致密度良好,颗粒均匀连续,断面形貌图可以看出薄膜呈柱状结构生长。FeCoV薄膜样品呈(110)取向生长,呈现明显的单轴各向异性。实验发现,FeCoV合金的磁致伸缩曲线与电流传感器的电流响应曲线趋势一致,具有线性区域,这些特性都为获得高灵敏度的磁传感器创造了条件。采用80 MHz的声表面波反射延迟线制备了电流传感器探头,FeCoV薄膜电流传感器的检测灵敏度可以达到6.7 kHz/A。
FeCoV film was prepared as magnetic susceptibility materials for current sensor by magnetic sputtering. Magnetostrictive curve of FeCoV alloys was measured by strain gauge methods. The magnetostriction coefficient was 97×10^(-6). SEM photos showed that FeCoV film had good density and uniformly continuous grains. Columnar crystal grains were observed in section of film. FeCoV film sample grew in(110) orientation with obvious uniaxial anisotropy. It was found the tendence of magnetostrictive curve was in an accordance with the current response of current sensor with the range of linearity, which contributed to preparation of magnetic sensor with high sensitivity. The current sensor probe was prepared by SAW reflection delay line of 80 Hz. The measured results showed that the FeCoV film sensor exerted higher sensitivity of 6.7 kHz/A.
作者
王东玲
赵晨阳
贾雅娜
杜兆富
WANG Dongling;ZHAO Chenyang;JIA Yana;DU Zhaofu(Functional Materials Research Institute,Central Iron and Steel Research Institute,Beijing 100081,China;Institute of Acoustics,Chinese Academy of Sciences,Beijing 100190,China)
出处
《金属功能材料》
CAS
2021年第4期91-94,共4页
Metallic Functional Materials
