摘要
目前对于超分辨成像技术的研究主要集中在超分辨重建算法方面,光学系统本身的装调误差对超分辨成像结果的影响尚未见报道。针对这一问题,开展了装调误差对超分辨成像影响的研究,建立了基于数字微镜器件(DMD)的超分辨成像光学系统的基本成像模型,设计了一个工作波段为8~12μm的DMD超分辨成像光学系统,提出了装调误差对超分辨成像质量影响的分析方法。在成像模型中分别引入适当的偏心、倾斜、镜片间隔误差、离焦等装调误差,对超分辨重建结果进行仿真分析,得出了该超分辨成像光学系统装调时的公差范围:该系统在加工装调时X方向总体偏心误差控制在±0.07 mm以内,Y方向总体偏心误差控制在±0.05 mm以内,X方向和Y方向的总体倾斜误差控制在±0.06°以内,总体镜片间隔误差控制在±0.02 mm以内,成像物镜的离焦量控制在±0.04 mm以内,投影物镜的离焦量控制在±0.05 mm以内,在此范围内超分辨成像光学系统可以保证超分辨成像的质量。
At present,most of the research on super-resolution imaging technology is focused on the superresolution reconstruction algorithm,but the influence of the alignment error of an optical system on the super-resolution imaging results has not been reported.To solve this problem,We researche the influence of alignment error on super-resolution imaging.First,the basic imaging model of super-resolution imaging optical system based on Digital Micro-mirror Device(DMD)is established.A DMD super-resolution imaging optical system with operating band of 8~12μm is designed,and a method used to analyze the influence of the alignment error on super-resolution imaging quality is proposed.In the imaging model,alignment errors such as eccentricity,tilt,lens spacing error and defocus are introduced,and the reconstruction results are analyzed.Finally,the range of tolerance of the super-resolution imaging optical system is obtained.The results show that the total eccentricity error in the X direction is controlled within±0.07 mm,and that in the Y direction is within±0.05 mm;the total tilt error in the X and Y directions is controlled within±0.06°;the overall lens spacing error is controlled within±0.02 mm;the defocusing amount of the imaging object lens is controlled within±0.04 mm;the defocusing amount of the projection objective lens is controlled within±0.05 mm,and within this range,the super-resolution imaging optical system can ensure the quality of super-resolution imaging.
作者
邢思远
王超
徐淼
李英超
史浩东
刘壮
付强
XING Si-yuan;WANG Chao;XU Miao;LI Ying-chao;SHI Hao-dong;LIU Zhuang;FU Qiang(Jilin Province Key Laboratory of Space Opto-Electronics Technology,Changchun University of Science and Technology,Changchun 130022,China;State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;School of Optoelectronic Engineering,Changchun University of Science and Technology,Changchun 130022,China)
出处
《中国光学》
EI
CAS
CSCD
北大核心
2021年第5期1194-1201,共8页
Chinese Optics
基金
国家自然科学基金(No.61805028,No.61805027,No.61705019,No.61701045)
装发2020年第二批快速扶持项目(No.61404140517)
科工局专项(No.KJSP2016010202)
国家自然基金天文联合基金(No.U1731240)
吉林省自然科学基金(No.20180101338JC)
应用光学国家重点实验室开放基金(No.SKLA02020001A11)。
关键词
装调误差容限
超分辨成像
光学设计
数字微镜器件
alignment error tolerance
super-resolution imaging
optical design
digital micro-mirror device
