摘要
运用COMSOL Multiphysics多物理场仿真软件对栅压调控纳米通道器件进行数值分析,通过耦合静电场、稀物质传递和层流模块进行仿真,以相同偏压下栅压变化对电渗流速度的调控作为评价标准,分析了不同通道高度、介电层厚度和通道长度尺寸下的栅压调控性能,结果表明栅压调控纳米通道器件的调控性能和器件尺寸参数有较大联系,优化器件尺寸参数是优化调控性能的重要手段。
The COMSOL Multiphysics simulation software was used to perform numerical analysis on gate voltage control nanochannel devices and simulated through coupling electrostatic field,transfer of dilute species and laminar flow modules.Taking the regulation of gate voltage variation on electroosmotic flow velocity under the same bias as the evaluation standard,the performance of gate voltage regulation under different channel height,dielectric layer thickness and channel length was analyzed.The results show that the control performance of the gate voltage control nanochannel device has a greater relationship with the device size parameters.The optimized device size parameters are important means to optimize control performance.
作者
刘骁
张然
张春鹏
褚金奎
Liu Xiao;Ran Zhang;Zhang Chunpeng;Chu Jinkui(Key Laboratory for Precision&Non-traditional Machining Technology,Ministry of Education,Dalian University of Technology,Dalian,Liaoning 116024,China)
出处
《机电工程技术》
2021年第9期66-68,共3页
Mechanical & Electrical Engineering Technology
