摘要
本文研究了改良西门子法多晶硅生产中从还原副产物回收六氯乙硅烷(Cl_(6)Si_(2))的工艺。通过对还原副产物组分分析,并用Aspen plus结合副产物各组分的物性,利用精馏工艺对还原副产物进行分离,回收和提纯六氯乙硅烷(Cl_(6)Si_(2))。并用灵敏度分析工具,得出流程中各精馏塔的最优设计和最优操作参数,优化后提纯的六氯乙硅烷(Cl_(6)Si_(2))纯度达到99.98%,回收率98.2%。
This paper studies the process of recovering hexachlorodisilane(Cl_(6)Si_(2))from the reduction by-product in the production of polysilicon by the improved Siemens method.By analyzing the components of the reduction by-products,and using Aspen plus to combine the physical properties of the components of the by-products,the reduction by-products are separated by a distillation process,and hexachlorodisilane(Cl_(6)Si_(2))is recovered and purified.Using sensitivity analysis tools,the optimal design and optimal operating parameters of each distillation column in the process were obtained.After optimization,the purity of the purified hexachlorodisilane(Cl_(6)Si_(2))reached 99.98%,and the recovery rate was 98.2%.
作者
明勇
Ming Yong(Sichuan Yongxiang New Energy Co.,Ltd.,Leshan 614802,China)
出处
《山东化工》
CAS
2021年第19期47-49,共3页
Shandong Chemical Industry
