摘要
基于光纤面板传像原理,提出了一种新型光纤面板的制作方法。采用光辅助电化学方法制备了硅微通道阵列,并将其作为光纤面板的骨架结构,通过氧化工艺在通道内壁制备二氧化硅层作为光纤包层,内部填充高折射率玻璃作为纤芯,制备出一种新结构的传像器件。其理论数值孔径为1.37,经初步测试,其分辨率可达到57 lp/mm。利用此方法制备的光纤面板不会有光串扰问题,可完全避免刀口响应,增加对比度。此方法能有效提高分辨率,有望成为制造高分辨率、高质量传像器件的新方法。
A new type of optical fiber panel manufacturing method was proposed.Based on the image transmission principle of optical fiber panel,silicon micro-channel array was fabricated by photo-assisted electrochemical method,which was used as the skeleton structure of the optical fiber panel.Silicon dioxide layer was prepared on the inner wall of the channel by oxidation process as the fiber cladding.High refractive index glass was filled in the inner wall as the fiber core.The theoretical numerical aperture is 1.37 and the resolution is 57 lp/mm.The optical fiber panel prepared by this method has the advantages of no optical crosstalk,good light collecting capacity,simplicity,easy operation,low cost,capability of effectively improving the number of pixels.The method is expected to become a new method for manufacturing high-resolution and high-quality image transmission devices.
作者
刘书异
杨炳辰
王国政
李连玉
姜柱松
LIU Shuyi;YANG Bingchen;WANG Guozheng;LI Lianyu;JIANG Zhusong(School of Science,Changchun University of Science and Technology,Changchun 130022,CHN;The 55th Research Institute of China Electronic Technology Group Corporation,Nanjing 210016,CHN)
出处
《光电子技术》
CAS
2021年第3期175-179,共5页
Optoelectronic Technology
基金
吉林省科技厅重点科技研发项目(20180201033GX)
吉林省科技厅技术攻关项目(20190302125GX)
吉林省科技厅重大科技专项(20200501006GX)
吉林省教育厅项目(No.JJKH20200777KJ)。
关键词
光纤面板
硅微通道阵列
数值孔径
分辨率
optical fiber panel
silicon microchannel array
numerical aperture
resolution
