摘要
提出了一种太赫兹腔体滤波器的制备方法,即通过微细电解线切割技术制作出镍牺牲芯模,镍芯模表面电镀金后进行选择性溶解,最终得到太赫兹滤波器腔体。研究发现,当电流密度为0.5 A/dm2时,可获得最佳微缝处电镀金形貌,在镍蚀刻剂TFG溶液中进行超声辅助加热,48 h后镍芯模即可全部去除。采用这种方法,成功制作出了端面和内腔形貌良好的WR1.0太赫兹腔体滤波器,经矢量网络电性能测试,该器件传输和反射性能良好,有望大规模应用于太赫兹系统中。
In this article,a preparation method of terahertz cavity filter was proposed,that is,the nickel sacrificial core mold was made by micro electrolytic wire cutting technology,and then the nickel core mold was selectively electroplated with gold,and finally the terahertz filter cavity was obtained.It was found that when the current density is 0.5 A/dm2,the best morphology of the electro-plated gold at the micro-slit was obtained.After ultrasonic assisted heating in nickel etchant TFG solution,the nickel core mold could be completely removed after 48 hours.By using this method,a WR1.0 terahertz cavity filter with good end face and inner cavity morphology was successfully fabricated.After the vector network electrical performance test,the device has good transmission and reflection performance,which made it expected to be used in terahertz system on a large scale.
作者
刘星
曾永彬
缪卓伟
LIU Xing;ZENG Yongbin;MIU Zhuowei(College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;School of Information Science and Engineering,Southeast University,Nanjing 210096,China)
出处
《电加工与模具》
2021年第6期47-51,共5页
Electromachining & Mould
基金
国家自然科学基金资助项目(51775276)
江苏省自然科学基金资助项目(BK20192007)。
关键词
太赫兹滤波器
微细电解线切割
微缝电镀金
terahertz filter
micro electrolytic wire cutting
micro-seam electroplating
