摘要
介绍了四甲基氢氧化铵的制备与检测方法。四甲基氢氧化铵的制备主要采用电解的方法,电解的原料有四甲基氯化铵和四甲基碳酸氢铵,两种原料在制备四甲基氢氧化铵的过程中各有优缺点,提纯原料的过程中也采用了不同的理念。四甲基氢氧化铵的检测项目主要是根据四甲基氢氧化铵的应用场合并结合具体的应用工艺,对所确定的检测指标及确认的数值范围进行检测。四甲基氢氧化铵主要用于正性光刻胶的显影。四甲基氢氧化铵在正性光刻胶显影的过程中,需要对表面张力进行精准控制。随着半导体制造工艺的提升,线宽逐渐降低,对显影液的纯度要求也越来越高。
The preparation and detection methods of tetramethylammonium hydroxide were introduced.Tetramethylammonium hydroxide is mainly prepared by electrolysis.The raw materials for electrolysis include tetramethylammonium chloride and tetramethylammonium bicarbonate.The two raw materials have their own advantages and disadvantages in the process of preparing tetramethylammonium hydroxide.Different ideas are also adopted in the process of purifying raw materials.The test items of tetramethylammonium hydroxide are mainly to test the determined test indexes and confirmed value range according to the application field of tetramethylammonium hydroxide and combined with the specific application process.Tetramethylammonium hydroxide is mainly used for the development of positive photoresists.During the development of positive photoresist,the surface tension of tetramethylammonium hydroxide needs to be accurately controlled.With the improvement of semiconductor manufacturing process,the linewidth decreases gradually,and the purity requirements of developer are higher and higher.
作者
刘耀鹏
LIU Yaopeng(Jingrui Electronic Materials Co.,Ltd.,Suzhou Jiangsu 050011,China)
出处
《山西化工》
2022年第1期86-88,共3页
Shanxi Chemical Industry
关键词
四甲基氢氧化铵
电解
纯度
表面张力
tetramethylammonium hydroxide
electrolysis
purity
surface tension
