摘要
为了研究不同弯曲曲率对V型梁结构具有不同的影响,提出了以LCP柔性材料为衬底的V型梁弯曲的力学模型,并通过软件仿真和实验验证了弯曲曲率对柔性V型梁器件的影响。从对比结果可得,当柔性衬底的曲率从0逐渐增大到33.3 m^(-1)时,V型梁的驱动电流也随之增大,实测值与仿真值的最大误差低于6.0%,很好地揭示了柔性衬底弯曲曲率对V型梁结构的驱动性能产生的影响。
In order to study the effect of different curvature on V-beam structure,a mechanical model of V-beam bending based on LCP flexible material was proposed,and the influence of curvature on flexible V-beam device was verified by software simulation and experiment.The results show that when the curvature of the flexible substrate increases from 0 to 33.3 m^(-1),the driving current of the V-beam increases,and the maximum error between the measured value and the simulation value is less than 6.0%,which well reveals the influence of the curvature of the flexible substrate on the driving performance of the V-beam structure.
作者
陈林林
李伟
张玉华
CHEN Lin-lin;LI Wei;ZHANG Yu-hua(School of Mechanical Engineering,Zhengzhou University of Science and Technology,Zhengzhou 450064,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2022年第2期7-10,51,共5页
Instrument Technique and Sensor
基金
河南省高等学校重点科研项目计划(22A460031)
2020年度河南省教育厅高校重点研究项目(20B460016)。
关键词
MEMS
弯曲曲率
柔性衬底
V型梁结构
力学特性
MEMS
bending curvature
flexible substrate
V-beam structure
mechanical properties
