摘要
Low-loss and compact optical waveguides are key for realizing various photonic integrated circuits with long onchip delay lines,such as tunable optical delay lines,optical coherence tomography,and optical gyroscopes.In this paper,a low-loss and compact silicon photonic waveguide spiral is proposed by introducing broadened Archimedean spiral waveguides with a tapered Euler S-bend.A 100-cm-long waveguide spiral is realized with a minimal bending radius as small as 10 μm by using a standard 220-nm-thick silicon-on-insulator foundry process,and the measured propagation loss is as low as 0.28 dB/cm.Furthermore,the present waveguide spirals are used to realize a 10-bit tunable optical delay line,which has a footprint as small as 2.2 mm × 5.9 mm and a dynamic range of 5120 ps with a fine resolution of 10 ps.
基金
National Major Research and Development Program (2018YFB2200200, 2018YFB2200201)
National Science Fund for Distinguished Young Scholars (61725503)
National Natural Science Foundation of China(61961146003, 91950205)
Zhejiang Provincial Major Research and Development Program (2021C01199)
Zhejiang Provincial Natural Science Foundation(LD19F050001, LZ18F050001)
Fundamental Research Funds for the Central Universities。
