摘要
为了解决传统的铂电阻、金属等温度传感器灵敏度不高及性能不稳定的问题,选用新型纳米材料还原氧化石墨烯为温敏材料,利用mems工艺制备了叉指电极热敏电阻,通过滴涂法将还原氧化石墨烯与叉指电极有效组装起来,制备了一种硅基还原氧化石墨烯热电阻温度传感器,对还原氧化石墨烯形貌进行了扫描电子显微镜(SEM)表征,并搭建了测试系统对性能进行了测试。结果表明,从30℃~210℃范围内,传感器的电阻随温度的上升而下降,传感器的灵敏度约为85.97719Ω/℃,线性度高达0.98049,同时具有极小的迟滞性和良好的稳定性。
In order to solve the problem of low sensitivity and unstable performance of traditional platinum resistance,metal and other temperature sensors,selects a new nanomaterial reduced graphene oxide as the temperature-sensitive material and prepares the interdigital electrode thermistor by using the mems process,and effectively assembles the reduced graphene oxide and the interdigital electrode by drop coating method to prepare a silicon-based reduced graphene oxide thermistor temperature sensor.The reduced graphene oxide morphology was characterized by scanning electron microscopy(SEM),and a test system was built to test the performance.The results show that the resistance of the sensor decreases with the increase of temperature in the range from 30℃ to 210℃.The sensitivity of the sensor is about 85.97719Ω/℃,and the linearity is as high as 0.98049,while it has a very small hysteresis and good stability.
作者
张君娜
梁庭
雷程
赵珠杰
齐蕾
Zhang Junna;Liang Ting;Lei Cheng;Zhao Zhujie;Qi Lei(Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China;North Automatic Control Technology Institute,Taiyuan 030006,China)
出处
《电子测量技术》
北大核心
2021年第23期68-72,共5页
Electronic Measurement Technology
基金
山西省自然科学基金项目(201801D221203)
高等学校科技创新项目(1810600108MZ)资助。
关键词
还原氧化石墨烯
叉指电极
滴涂法
温度传感器
测试
reduced graphene oxide
the interdigital electrode
drop coating method
temperature sensor
testing
