摘要
通过对现有国产高温纯化设备气场气路进行分析,对发现的问题进行优化处理,并根据新方案设计制造气场分气盘和气路,使国产高温纯化设备达到国外先进设备的纯化指标,满足我国三代半导体对于高纯度材料的要求。
By analyzing the gas field circuit of the existing domestic high-temperature purification equipment,optimized the problems, and the new gas field distribution plate and gas circuit were designed and manufactured according to the new scheme, so that the domestic high-temperature purification equipment reached the purification index of foreign advanced equipment and met the requirements of the third generation semiconductors for high-purity materials in China.
作者
吴忠举
白枭
王晓峰
成洋洋
许河山
周社柱
Wu Zhongju;Bai Xiao;Wang Xiaofeng;Cheng Yangyang;Xu Heshan;Zhou Shezhu(CETC New Energy Technology Co.,Ltd.,Taiyuan Shanxi 030024)
出处
《现代工业经济和信息化》
2022年第2期226-228,共3页
Modern Industrial Economy and Informationization
关键词
三代半导体
高温纯化设备
纯化气路优化
高纯材料
third-generation semiconductor
high temperature purification equipment
purification gas path optimization
high-purity materials
