摘要
为解决刀具/齿轮钢表面涂层结合性能差、不能长期保护基体的问题,采用直流和射频混合的低温磁控溅射方法在齿轮刀具钢表面制备了复合TiSiCN涂层,并借助X射线衍射、扫描电子显微镜、附着力划痕仪、显微硬度计和电化学工作站等研究了沉积温度对涂层结构和性能的影响。结果表明,复合涂层为B1型面心立方结构,包含TiC和TiC_(0.3)N_(0.7)两种物相,并在(111)晶面择优取向。随着沉积温度的增加,涂层表面变得光滑平整,结晶度和致密度提高,硬度增大,涂层与基体结合力增大,耐蚀性能提高,沉积温度250℃时涂层表面质量和性能最佳。沉积温度为300℃时,涂层表面缺陷增加,结合性能和硬度值下降,耐蚀性能下降。
To solve the problem of poor bonding property between the surface of tool/gear steel and coating which cannot protect the substrate for a long time,TiSiCN composite coating was prepared on the surface of gear tool steel by DC and RF hybrid magnetron sputtering at low temperatures.The effects of deposition temperature on the structure and properties of the obtained coatings were investigated by means of X-ray diffraction,scanning electron microscope,adhesion force tester,microhardness tester and electrochemical workstation.The results show that the composite coating is a face-centered cubic structure,containing TiC and TiC_(0.3)N_(0.7) phases,and has a(111)preferred orientation.With the increase of deposition temperature,the surface morphology of the coating becomes smooth and flat,the crystallinity and density increase,the hardness increases,the adhesion between coating and substrate increases,and the corrosion resistance improves.The quality and performance of the coating are the best when the deposition temperature is 250℃.When the deposition temperature is 300℃,the surface defects of the coating increase,the bonding properties and hardness of the film decrease,and the corrosion resistance also decreases.
作者
王慧
郭秀珍
关海英
曹慧
WANG Hui;GUO Xiuzhen;GUAN Haiying;CAO Hui(Department of Mechanical and Electrical Engineering,Inner Mongolia Technical College of Mechanics and Electrics,Hohhot 010070,China)
出处
《电镀与精饰》
CAS
北大核心
2022年第5期1-7,共7页
Plating & Finishing
关键词
TiSiCN涂层
沉积温度
微观结构
附着力
耐蚀性能
TiSiCN coating
deposition temperature
microstructure
adhesive force
corrosion resistance
