摘要
以定向凝固法生长硅晶体为例,针对加热器生成固有磁场作用下导电硅熔体的流动特性开展数值模拟研究。首先计算获得了不同加热电流接入方式下熔体区域洛伦兹力的大小与方向分布,进而研究了洛伦兹力驱动下熔体流动的结构与强度。结果表明,导电硅熔体中加热器生成固有磁场的磁感应强度约为10^(-3) T、感应电流密度约为10^(4) A/m^(2)、最大洛伦兹力可达12 N/m^(3),大的洛伦兹力主要分布在熔体的上部和侧部表面附近区域,能够驱动熔体流动呈现强烈的三维特征,改变加热电流的接入方式能够显著影响洛伦兹力的空间分布及熔体的流动特性。相关研究有助于深入认识加热器的加热与磁场控制双重功能,有助于实现对导电熔体流动和定向凝固过程的精确控制。
Numerical simulation is used to study the influence of the heater-generated inherent magnetic field on the conductive silicon melt flow in the directional solidification(DS)of multi-crystalline silicon crystals.The magnitude and direction characteristics of the Lorentz force in the melt for different heating current connection modes are calculated,and then the pattern and intensity of the melt flow driven by the Lorentz force are studied.Results show that the induction intensity of the inherent magnetic field generated by the heater is about 10^(-3) T,the induced current density is about 10^(4) A/m^(2),and the maximum Lorentz force is up to 12 N/m^(3).Large Lorentz force is mainly distributed in the upper and side regions of the melt and it can drive the melt flow to present strong three-dimensional characteristics.Adjusting the heating current connection mode can significantly influence the Lorentz force distribution and the melt flow.This research provides a reference for the deep understanding of the dual functions of the heater,i.e.,heating and magnetic field control,and for the realization of precise control of the melt flow during DS process.
作者
李早阳
刘文超
周亮宇
刘立军
王跃
LI Zaoyang;LIU Wenchao;ZHOU Liangyu;LIU Lijun;WANG Yue(School of Energy and Power Engineering, Xi’an Jiaotong University, Xi’an 710049, China;Engreat Precision Machine Co., Ltd., Taizhou, Jiangsu 225300, China)
出处
《西安交通大学学报》
EI
CAS
CSCD
北大核心
2022年第5期64-73,共10页
Journal of Xi'an Jiaotong University
基金
国防预研基金资助项目(6142801200108)
凝固技术国家重点实验室开放课题资助项目(SKLSP201905)
泰州市高层次创新创业人才(团队)引进计划资助项目(202012)。
关键词
定向凝固
固有磁场
熔体流动
数值模拟
directional solidification
inherent magnetic field
melt flow
numerical simulation
