摘要
为了研究微/纳米技术在光学、精密加工和精确定位等领域的应用,提出了一种线性偏摆复合型压电微动平台,以实现线性运动和偏摆运动。对平台的组成和工作原理进行阐述,建立两种运动的数学模型,并进行运动性能仿真。根据拟定的尺寸加工出样机,对样机的运动能力和频响特性进行测试。最后,通过比例积分微分(Proportional Integral Derivative,PID)反馈实现对平台的跟踪控制。仿真和实验结果表明:该平台具有良好的运动精度和解耦性,一阶固有频率可以达到333.8 Hz,能够实现24.924μm的线性运动和1.330 mrad的角度摆动,实现了微/纳米级别的运动,在精密光学、精确定位等领域具有广阔的应用前景。
To extend the applications of micro/nano technology in the fields of optics,precision machining,and precise positioning,this study introduces the design,analysis,and testing process for a two-degree-of-freedom micro-movement platform to achieve linear and yaw motion.First,the main composition and working principle of the designed platform are introduced.Subsequently,the mathematical models of the two motions are established and simulated to assess motion performance.A prototype is fabricated considering the size of the piezoelectric platform,and an experimental platform is established to test the motion capability and frequency response.Finally,the precise control of the platform is realized via proportional integral derivative method.The simulation and experimental results demonstrate that the platform achieves good motion accuracy and decoupling performance,with the first natural frequency reaching 333.8 Hz.Moreover,the platform can achieve 24.924μm linear motion and 1.330 mrad angular swing.The designed structure can serve as reference for the design of micro-motion platform and the research of high-precision motion.
作者
王耿
魏维宁
代军
闫勇刚
WANG Geng;WEI Weining;DAI Jun;YAN Yonggang(School of Mechanical and Power Engineering,Henan Polytechnic University,Jiaozuo 454000,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2022年第9期1058-1070,共13页
Optics and Precision Engineering
基金
河南省科技攻关项目(No.202102210082,No.212102210323)
河南理工大学杰出青年基金资助项目(No.J2020-5)
河南理工大学博士基金资助项目(No.B2014-037,No.B2017-32)
河南理工大学青年骨干教师基金资助项目(No.2017XQG-04)。
关键词
微动平台
线性运动
偏摆运动
柔性机构
数学模型
micro-motion platform
linear motion
yaw motion
flexible mechanism
mathematical model
