摘要
二维过渡金属硫化物(TMDC)材料因为独特的激子效应和材料学性质,在太阳电池、光催化、传感器、柔性电子器件等领域得到广泛的应用。层数对其性质有显著的调控作用,自动检测识别所需层数的样品是其从实验室走进半导体制造工业的重要技术需求。本文结合反射高光谱成像技术与图像处理算法,发展了一种二维TMDC薄层样品的显微成像自动检测技术。基于自主搭建的反射高光谱成像系统,对制备的不同层数TMDC标准样品进行了光学对比度的系统研究,阐明了层数的差分反射光谱机理,提出了可靠的层数判定方法。基于传统边缘检测技术优化设计了一套图像处理算法,实现了TMDC样品的图像检测及层数鉴定。本文方法具有普遍性、实用性,结合自动对焦的扫描控制,能够实现大规模的自动化样品检测,这也为其他表面目标的显微识别和检测提供了新的灵感和参考。
Two-dimensional transition metal sulfides(TMDCs)are widely used in solar cells,photocatalysis,sensors,flexible electronic devices and other fields due to their unique exciton effect and material properties.The layer-number has a significant effect on their properties,thus rapid and automatic detection technology of TMDC samples with required layer-number is urgently required for their application expanding from laboratories to semiconductor manufacturing industries.In this paper,a thin-layer TMDC sample automatic detection technology was proposed,combining the hyperspectral imaging method and the image processing algorithm.The optical contrast of TMDC samples with different layer-numbers was systematically studied using a self-built reflection hyperspectral imaging system.The differential reflection mechanism of the optical contrast was elucidated,and a reliable layer-number determination method was proposed.Additionally,an image processing algorithm was designed to seek out TMDC samples with determined layer-number from the microscopic images.This method is universal and practical which can realize large-scale automatic sample detection when combining with auto-focus scanning control.It also provides new inspiration for detection of other surface targets at microscopic view.
作者
胡香敏
刘大猛
HU Xiangmin;LIU Dameng(The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
出处
《光散射学报》
2022年第1期60-65,共6页
The Journal of Light Scattering
基金
国家自然科学基金项目(52075284,51527901,11890672)。
