摘要
激光技术的不断发展对激光薄膜的光学性能、激光损伤阈值、机械性能等提出了越来越高的要求。具有低吸收损耗的激光薄膜在强激光、精密测量等领域有十分重要的应用。从电子束蒸发和离子束溅射沉积工艺、薄膜材料两个方面,对激光薄膜在吸收损耗控制方面的研究进展进行综述,详细介绍了制备过程中多个环节对薄膜吸收损耗的调控方法,以及单一材料和混合物薄膜的吸收机理、吸收调控方法。
The continuous development of laser technology has put forward higher requirements for the optical properties,laser-induced damage threshold,and mechanical properties of laser coatings.Laser coatings with low absorption loss have very important applications in the fields of high-power laser and precision measurement.In this paper,the research progress of laser coatings in absorption loss control is reviewed from two aspects,including the deposition processes of E-beam evaporation and ion beam sputtering and coating materials.The absorption loss control methods in different manufacture processes during deposition,as well as the absorption mechanism and control methods of pure material and mixture material coating are introduced in detail.
作者
温家慧
朱美萍
孙建
李静平
邵建达
Wen Jiahui;Zhu Meiping;Sun Jian;Li Jingping;Shao Jianda(Laboratory of Thin Film Optics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;College of Materials Science and Optoelectronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China;Hangzhou Institute for Advanced Study,University of Chinese Academy of Sciences,Hangzhou,Zhejiang 310024,China)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2022年第7期1-14,共14页
Acta Optica Sinica
基金
国家自然科学基金(61975215)
中国科学院青年创新促进会、中国科学院战略性先导科技专项(A类)(XDA25020206)。
关键词
薄膜
吸收损耗
混合材料
电子束蒸发
离子束溅射
thin films
absorption loss
mixture material
E-beam evaporation
ion beam sputtering
