摘要
系统工程方法在国内外以航空航天、国防科技和船舶工程等为代表的复杂设备系统的研发中发挥了重要作用。针对以光刻机为代表的先进半导体装备的研发,发展和提升以正向设计引领、以系统工程方法为指导的自主创新和设计制造一体化能力显得尤其重要。从系统工程的起源着手,介绍了系统工程的常见方法,并以半导体装备领域的应用为背景重点介绍了系统工程的工具链和基于模型的系统工程(MBSE)的部分关键技术。最后对系统工程方法,特别是对MBSE方法在我国半导体装备行业中的应用前景作了展望。
Systems engineering methods have played an important role in the research and development of complex equipment and systems represented by aerospace,defense technology,and ship engineering at home and abroad.For the research and development of advanced semiconductor equipment such as lithography machines,it is particularly important to develop independent innovation and integrated design and manufacturing capabilities led by forward design and guided by systems engineering methods.Starting from the origin of systems engineering,this paper gives a survey of the common methods of systems engineering,and focuses on the related systems engineering tool chains and key technologies of model-based systems engineering with the applications in the field of semiconductor equipment as the background.Finally,this paper looks forward to the application prospects of systems engineering methods,especially model-based systems engineering methods,in domestic semiconductor equipment industry.
作者
殳峰
许智磊
何乐
杨晓峰
Shu Feng;Xu Zhilei;He Le;Yang Xiaofeng(Academy for Engineering and Technology,Fudan University,Shanghai 200433,China;Qingyuan Research Institute,Shanghai Jiao Tong University,Shanghai 200240,China;Shanghai Micro Electronics Equipment(Group)Co.,Ltd.,Shanghai 201203,China;State Key Laboratory of ASIC and System,School of Microelectronics,Fudan University,Shanghai,200433,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2022年第9期427-437,共11页
Laser & Optoelectronics Progress
基金
中央引导地方科技发展资金(YDZX20203100004302)。
关键词
光学设计与制造
系统工程
基于模型的系统工程
半导体装备
信息物理系统
optical design and fabrication
systems engineering
model-based systems engineering
semiconductor equipment
cyber-physical system
