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数字微镜器件反射效率测试方法及装置

Test method and device for reflection efficiency of digital micro-mirror device
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摘要 为了获得数字微镜器件的真实光学特性,提出了其反射特性测试方法,并搭建实验装置对数字微镜器件的相对反射效率进行了测试,搭建了测试光路;利用该光路分别测得数字微镜器件和铝反射镜作为反射元件时相机接收到的光斑能量分布曲线,并对曲线进行积分;将2种测试条件下获得的积分值做除法,得到数字微镜器件的相对反射效率。测试结果表明,在使用632.8 nm波长激光器作为光源时数字微镜器件的相对反射效率为45.33%,在使用白光LED作为光源时数字微镜器件的相对反射效率为71.75%,经过多次测试发现2种测试模式下的重复精度均为±5%左右。上述测试结果可对今后使用数字微镜器件开发相关仪器时的能量传递效率计算以及器件选择起到一定参考作用。 In order to obtain the real optical characteristics of digital micro-mirror devices(DMD),a test method for the reflection characteristics was proposed,and an experimental device was built to test the relative reflection efficiency of digital micro-mirror devices.Firstly,the test optical path was built.Then,the optical path was used to measure the spot energy distribution curves received by the camera when the digital micro-mirror device and the aluminum mirror were used as the reflecting elements respectively,and the curves were integrated.Finally,the relative reflection efficiency of the digital micro-mirror device was obtained by dividing the integral values obtained under the two test conditions.The test results show that the relative reflection efficiency of the digital micro-mirror device is 45.33%when using a 632.8 nm wavelength laser as the light source and 71.75%when using the white LED as the light source.After many tests,it is found that the repeatability precision of the two test modes is about±5%.The above test results can be used as a reference for the calculation of energy transfer efficiency and device selection when using digital micro-mirror devices to develop related instruments in the future.
作者 高毅 于瀛 张靖 GAO Yi;YU Ying;ZHANG Jing(Key Laboratory of Trace Inspection and Identification Technology(Ministry of Public Security),Criminal Investigation Police University of China,Shenyang 110035,China;Science and Technology on Electro-Optical Information Security Control Laboratory,Tianjin 300308,China;Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 100081,China)
出处 《应用光学》 CAS CSCD 北大核心 2022年第4期714-718,共5页 Journal of Applied Optics
基金 公安部科技强警基础工作专项项目(GABJC04) 吉林省科技发展计划项目(20210203053SF) 辽宁省教育厅重大科研经费项目(ZGXJ2020002) 中国刑事警察学院科研基金项目(D2019036)。
关键词 数字微镜器件 微镜单元 反射效率 相对效率 digital micro-mirror device micro-mirror unit reflection efficiency relative efficiency
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