摘要
利用丝网印刷法制备了一种碳纳米管场发射阴极,并将其用作圆筒型三极式电离规的电子源,研究了该电离规在空气氛围中的计量学特性。研究表明,在10^(-7)~10^(-4) Pa的压力范围内电离规离子电流和实验气体压力呈良好线性特征,测量下限比传统圆筒型三极式热阴极电离规低2个数量级;该规的功耗仅8.5 mW,灵敏度约0.047 Pa^(-1),极低的功耗使其在空间探测中具有潜在应用价值。
A carbon nanotube field emission cathode was prepared by screen printing method,and it was used as the electron source of the cylindrical triode-type ionization gauge.The metrological characteristics of the developed ionization gauge in air atmosphere were investigated.It is shown that the ion current and experimental gas pressure of the developed ionization gauge shows good linearity in the range of 10^(-7)~10^(-4) Pa,and the lower limit of measurement of this gauge is two orders of magnitude lower than that of the conventional cylindrical triode-type hot cathode ionization gauge.In addition,the power consumption of the gauge is only 8.5 mW and the sensitivity is about 0.047 Pa^(-1).The extremely low power consumption of the currently developed ionization gauge makes it have obvious advantages in space applications.
作者
王永军
张建
WANG Yongjun;ZHANG Jian(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China;School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China)
出处
《真空与低温》
2022年第4期420-424,共5页
Vacuum and Cryogenics
基金
国家自然科学基金(61671226、61971133、61627850)。
关键词
电离规
碳纳米管
场发射阴极
真空计量
测量下限
ionization gauge
carbon nanotube
field emission cathode
vacuum metrology
lower limit of measurement
