摘要
基于中国计量科学研究院的表面粗糙度基准计量装置,开展了视觉定位系统、自动操作系统和多自由度位移系统的研究,从而实现依据国际比对协议规定流程的自动化测量。实验验证表明:该系统可有效实现表面粗糙度的自动化测量,满足国际比对的要求。在对国际比对规定的表面粗糙度标准器的测量实验中,该系统的自动定位测量的重复性为4.2 nm,相比于手动定位测量提高了2.6倍,有效地减少了测量过程中引入的人为误差。
Based on the surface roughness measurement device of NIM,researches on the visual positioning system,automatic operating system and multi-degree-of-freedom displacement system have been carried out,so as to realize the automatic measurement in accordance with the procedures specified in the international comparison agreement.Through experimental verification,the system can effectively realize the automatic measurement of surface roughness and meet the requirements of international comparison.In the measurement experiment on the surface roughness standard specified by the international comparison,the repeatability of the automatic positioning measurement of the system is 4.2 nm,which is 2.6 times higher than the manual positioning measurement,and can effectively reduce the introduction of human error in the measurement process.
作者
卜祥鹏
张树
皮磊
施玉书
BU Xiang-peng;ZHANG Shu;PI Lei;SHI Yu-shu(National Institute of Metrology,Beijing 100029,China;Shenzhen Institute of TechnologyInnovation,NIM,Shenzhen,Guangdong 518132,China)
出处
《计量学报》
CSCD
北大核心
2022年第7期844-850,共7页
Acta Metrologica Sinica
基金
中国计量科学研究院质量技术基础能力建设(ANL2003)
中国计量科学研究院基本科研业务费(AKY1605)。
关键词
计量学
表面粗糙度
国际比对
自动测量
视觉定位
测量重复性
metrology
surface roughness
international comparison
automatic measurement
visual positioning
measurement repeatability
