摘要
工业镜头元件口径小、数量多、精度要求高,将自由曲面用在镜头凸面上会导致面形复杂、偏离量大,对表面面形检测提出了很高的挑战。提出了基于计算全息板(Computer-Generated-Hologram,CGH)的干涉检测方法,并利用Zemax对光路进行优化设计,建立了镜头装夹误差对检测结果的影响分析模型,提出了镜头高精度干涉检测方案,并结合实验验证了分析模型和检测方案的可靠性。实验结果表明:利用CGH可实现凸自由曲面工业镜头的全口径干涉检测,检测结果为0.57μm PV (满足镜头检测需求),并结合轮廓仪对比验证了干涉测量的可靠性。
Industrial lens elements have small aperture, large quantity and high precision requirements. Using free-form surface on the convex surface of lens will lead to complex surface shape and large deviation, which poses a high challenge of surface testing. An interferometric testing based on CGH was proposed. By using the Zemax software, we optimized the optical design, established the model to analyze the influence by the calibrating errors of industrial lens, and proposed an interferometric testing scheme of industrial lens. An experiment by testing a freeform surface of industrial lens was provided to demonstrate the reliability of the model and scheme. The experimental results show that CGH can realize the full aperture interference testing of convex free-form surface industrial lens, and the testing result is 0.57 μm PV which meets the needs of lens testing and verifies the reliability of interferometry by comparing with profilometer.
作者
朱德燕
唐骏伟
国成立
李元正
赵烈烽
Zhu Deyan;Tang Junwei;Guo Chengli;Li Yuanzheng;Zhao Liefeng(Aerospace Institute,Nanjing University of Aeronautics and Astronautics,Nanjing 211106,China;Key Laboratory of Space Photoelectric Detection and Perception(Nanjing University of Aeronautics and Astronautics),Ministry of Industry and Information Technology,Nanjing 211106,China;Zhejiang Sunny Optical Company,Yuyao 315400,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2022年第9期84-90,共7页
Infrared and Laser Engineering
