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Optical properties of Sr_(x)Ba_(1−x)Nb_(2)O_(6)nanoscale films(x=0.5 and 0.61)grown by RF-cathode sputtering in an oxygen atmosphere

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摘要 The research findings of the phase composition,nanostructure and optical properties of strontium-barium niobate thin films are discussed.Sr_(x)Ba_(1−x)Nb_(2)O_(6)nanosized films(x=0.5 and 0.61)were characterized by XRD,SEM and AFM studies.Reflective multi-angle ellipsometry and spectrophotometry were used to determine the optical parameters(refractive index,its dispersion,and thickness of the damaged surface layer)of thin films.It was shown that SBN-50 and SBN-61 thin films were grown c-oriented on Al_(2)O_(3)(0001)and heteroepitaxial on MgO(001)substrates.The increase of refractive index,approaching its maximum value in the bulk material for a given composition as the film thickness increases,is observed.
出处 《Journal of Advanced Dielectrics》 CAS 2021年第5期48-53,共6页 先进电介质学报(英文)
基金 The authors are grateful to V.B.Shirokov for conducting studies of the films surface by the AFM method.This work was carried out within the framework of the State Assignment of the SSC RAS(Theme of State Registration No.01201354247).
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