摘要
随着航空航天飞行器性能的不断提升,对温度传感器的要求不断提高,不断趋向于更高温度、更快响应、更小体积。薄膜热电偶因具有响应速度快、热接点小、便于集成等优点,非常适用于航空发动机涡轮叶片、燃烧室内壁、高温燃气进出口、高超声速飞行器表面等极端高温环境下的瞬态温度测量。对于薄膜热电偶来说,它的制备工艺显得尤为重要,因此分别从溅射工艺参数和热处理工艺参数两方面对薄膜热电偶的研究现状进行了汇总介绍和分析。
With the continuous improvement of the performance of aerospace vehicles,the requirements for temperature sensors continue to increase with the trend of higher temperature,faster response,and smaller size.In particular,thin-film thermocouples have the advantages of fast response,small thermal nodes,and easy integration which are very suitable for transient temperature measurement in extreme high temperature environment,such as aero engine turbine blade,combustion chamber wall,high temperature gas inlet and outlet,hypersonic vehicle surface and so on.For thin-film thermocouple,its preparation process is particularly important.Therefore,the research status of thin-film thermocouple is summarized and analyzed from two aspects:sputtering process parameters and heat treatment process parameters.
作者
黄漫国
李水敏
张梅菊
梁晓波
张仲恺
田边
HUANG Man-guo;LI Shui-min;ZHANG Mei-ju;LIANG Xiao-bo;ZHANG Zhong-kai;TIAN Bian(AVIC Beijing Changcheng Aeronautical Measurement and Control Technology Research Institute,Beijing 101111,China;Aviation Key Laboratory of Science and Technology on Special Condition Monitoring Sensor Technology,Beijing 101111,China;State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an 710049,China)
出处
《测控技术》
2022年第11期42-46,共5页
Measurement & Control Technology
关键词
温度测量
薄膜热电偶
制备工艺
temperature measurement
thin-film thermocouple
preparation process
