摘要
钨灯丝扫描电子显微镜具有造价和运行成本低、样品适用性广的特点,在各研究机构的利用率很高,日常维护保养是保障其性能的必要手段.除了常规的扫描电子显微镜维护以外,因钨灯丝扫描电子显微镜结构特点,又有一些异于其它类型扫描电子显微镜的维护要点.以蔡司的EVO MA 15型钨灯丝扫描电子显微镜为例,从电子光学系统、真空系统、成像系统三个方面,阐述了钨灯丝扫描电子显微镜日常维护保养的具体办法,以供同行参考.
The tungsten filament scanning electron microscope is of low price and maintenance cost,wide applicability of samples,and high utilization rate in various research institutions.Its routine maintenance is a necessary means to ensure the performance of tungsten filament scanning electron microscope.In addition to the conventional scanning electron microscope maintenance,there are some maintenance points that are different from other types of scanning electron microscope due to the structural characteristics of the tungsten filament scanning electron microscope.Taking EVO MA 15 tungsten filament scanning electron microscope as an example,the specific methods of routine maintenance of tungsten filament scanning electron microscope were introduced from three aspects of electron optical system,vacuum system and imaging system,so as to provide reference for pepole of the same trade.
作者
陈新芳
周静韵
CHEN Xin-fang;ZHOU Jing-yun(Instrumental Analysis and Research Center,South China Agricultural University,Guangzhou 510642,China)
出处
《分析测试技术与仪器》
CAS
2022年第4期480-484,共5页
Analysis and Testing Technology and Instruments
关键词
钨灯丝扫描电子显微镜
日常维护
tungsten filament scanning electron microscope
routine maintenance
