摘要
本文介绍了一种基于改进遗传算法PID对外延加热系统控制系统。在建立外延感应加热系统原理模型的基础上,利用遗传算法的寻优特点,得到适应值的最优解,找出PID的最佳参数。寻优得到的PID参数与温控仪自整定PID参数结果进行比较,发现寻优后的PID能够达到更好的控制效果。
This paper introduces a control heating system of epitaxy equipment based on improved genetic algorithm PID.On the basis of establishing the induction heating system model of epitaxy equipment,using the optimization characteristics of genetic algorithm,the optimal solution of the fitness value is obtained,and the optimal parameters of PID are found.Comparing the optimized PID parameters with the self-tuning PID parameters of the temperature controller,it is found that the optimized PID can achieve better control effect.
作者
盛飞龙
王鑫
王慧勇
唐卓睿
高桑田
孔倩茵
SHENG Fei-long;WANG Xin;WANG Hui-yong;TANG Zhuo-rui;GAO Sang-tian;KONG Qian-yin(JI HUA Laboratory)
出处
《中国集成电路》
2023年第1期74-77,共4页
China lntegrated Circuit
基金
季华实验室基金项目:宽禁带半导体SiC高温外延生长装备开发和产业化(编号:X210241TC210)。
