摘要
硅片是半导体关键的基础材料,我国半导体硅片对外依存度较高,增强硅片的自主保障能力,对提升我国半导体产业整体水平至关重要。本文重点围绕市场主流的8 in、12 in硅片,分析了全球半导体硅片的技术和产业发展现状,研判了全球半导体硅片产业未来的发展趋势,重点分析了我国半导体硅片的发展现状,指出我国半导体硅片在当前市场需求、宏观政策、配套能力、研发投入等利好因素下迎来难得的发展机遇,同时提出我国半导体硅片产业发展面临挑战,在此基础上,从进一步加强顶层设计和宏观规划、强化政策落实和政策持续性、协调支持产业链协同发展、布局研发集成电路先进制程用半导体硅片等方面提出对策建议,以期为推动我国半导体硅片向更高质量发展提供参考。
Silicon wafers are fundamental materials for semiconductors.China’s semiconductor silicon wafers are highly dependent on foreign trade.Enhancing the independent guarantee capability of silicon wafers is significant for improving the overall level of China’s semiconductor industry.This study focuses on the market-dominant 8-inch and 12-inch silicon wafers,analyzes the development status of the global semiconductor silicon wafer technologies and industry,and prospects the development trend of the industry.The study specifically focuses on the development status of China’s semiconductor silicon wafer industry,and points out that the industry in China is currently facing critical developing opportunities considering the market demand,macro policies,supporting capacities,R&D investment,and other favorable factors;meanwhile,it still faces challenges.Furthermore,the following measures and suggestions are proposed:(1)further strengthening top-level design and macro planning,(2)strengthening policy implementation and sustainability,(3)supporting the coordinated development of the industrial chain,and(4)developing semiconductor silicon wafers for advanced processing of integrated circuits,hoping to provide a reference for the higher-quality development of China’s semiconductor silicon wafer industry.
作者
张果虎
肖清华
马飞
Zhang Guohu;Xiao Qinghua;Ma Fei(National Engineering Research Center for Key Materials of Integrated Circuits,Beijing 100088,China)
出处
《中国工程科学》
CSCD
北大核心
2023年第1期68-78,共11页
Strategic Study of CAE
基金
中国工程院咨询项目“我国先进有色金属材料发展战略研究”(2022-XZ-20)。
关键词
半导体硅片
8
in
12
in
产业协同
先进制程
semiconductor silicon wafer
8 inches
12 inches
industry synergy
advanced processing