期刊文献+

基于新型固定流导元件的定压法NEG吸气性能测试方法研究 被引量:1

Research on the Sorption Performance Test Method of NEG by Constant Pressure Method Based on the New Constant Conductance Element
原文传递
导出
摘要 本文采用改进的定压法测试非蒸散型吸气剂(NEG)对氢气的吸气性能,在进气室和吸气室之间安装新型固定流导元件,结合针阀,提供可控进气流量,维持吸气测试过程中吸气压力恒定。通过测量记录吸气室内部压力变化,计算获得NEG吸氢性能参数。实验使用的新型固定流导元件为玻璃-硅分子流漏孔,对25℃下H_(2)的流导约为5×10^(-12)m^(3)/s,在一个大气压下,仍能保证气体通过漏孔内流态为分子流。在数个小时的吸气测试过程中,结合漏孔,调节微调针阀,吸气压力上升约2.843×10^(-5)Pa/h。本系统可以测试不同吸气材料在不同吸气压力、工作温度下的吸气能力。测试结果表明,当吸气压力一定时,50℃左右温度下Zr-Fe吸气剂的吸氢性能最佳;当工作温度一定时,Zr-Fe吸气剂吸气压力越高,吸氢性能越好;相同测试条件下Zr-Fe吸气剂的吸氢性能优于Zr-Al吸气剂。 In this work,we use the improved constant pressure method to test the sorption performance of non-evaporable getter (NEG) for hydrogen.The new constant conductance element is installed between the gas chamber and the inspiratory chamber to provide controllable air inlet flow with a needle valve while maintaining the constant sorption pressure during the sorption test.By measuring the pressure changes in the gas chamber,we can calculate the sorption performance parameters of NEG.The new constant conductance element used in the experiment is a glass-silicon molecular flow leak,and the conductance of H_(2) at 25℃is about 5×10^(-12) m^(3)/s.It can achieve molecular flow at an atmospheric pressure.During several hours of testing,the sorption pressure rose by 2.843×10^(-5) Pa/h.The system can test the sorption capacity of different getters under different sorption pressures and temperatures.The results show that when the sorption pressure is constant,the hydrogen absorption performance of the Zr-Fe getter is the best at about 50℃.When the temperature is constant,the higher the sorption pressure,the better the performance.Besides,under the same test conditions,the hydrogen absorption performance of the Zr-Fe getter is better than that of the Zr-Al getter.
作者 王蓝陵 林文豫 王婧华 张俊 毕海林 曹青 王旭迪 WANG Lanling;LIN Wenyu;WANG Jinghua;ZHANG Jun;BI Hailin;CAO Qing;WANG Xudi(School of Mechanical Engineering,Hefei University of Technology,Hefei 230009,China;Beijing Institute of Aeronautical Materials Co.,Ltd.,Beijing 100089,China)
出处 《真空科学与技术学报》 EI CAS CSCD 北大核心 2022年第12期937-942,共6页 Chinese Journal of Vacuum Science and Technology
基金 国家自然科学基金面上项目(No.61871172) 国家自然科学基金青年基金项目(No.62101172)。
关键词 改进定压法 NEG 玻璃-硅漏孔 吸氢性能测试 Improved constant pressure method NEG Glass-silicon leak Hydrogen absorption performance test
  • 相关文献

参考文献3

二级参考文献18

  • 1欧昌银,李茂松,陈鹏,赵光辉,胡琼.微电路内部气氛含量分析与控制[J].微电子学,2005,35(2):153-156. 被引量:10
  • 2肖玲,徐学良,李伟.混合集成电路内部气氛研究[J].微电子学,2005,35(2):157-160. 被引量:6
  • 3郭长娟,黄正旭,陈华勇,周振.飞行时间质谱仪国内研究状况及发展趋势[J].现代仪器,2007,13(4):1-5. 被引量:15
  • 4X. Breni b re, P. Tribolet IR detectors design and approachfor tactical applications with high reliability withoutmaintenance[J].proc. SPIE 2008.6940-15.
  • 5W.Stephen.New technologies for FPA Dewars [J]. proc.SPIE 1992,1683.
  • 6P.Chorier. Sofradir MCT technology for space applications' [J]. proc.'SPIE 2009.7330-07.
  • 7M. Molina, X. Breni h re, P. Tribolet. IR detector dewarand assemblies for stringent environmental conditions [J].proc. SPIE 2007.6542-85.
  • 8X. Breni fe re, A. Manissadjian, M. Vuillennet, et al.Reliability optimization for IR detectors with compactcryo - coolers [J]. proc. SPIE 2005.5783-21.
  • 9P. Tribolet, P Chorier, S. Dugalleixet et al. Light weight,compact, and affordable MW TV format IR detectors[J]_ proc. SPIE 2004.5406-20.
  • 10Mamun M A A, Elmustafa A A, Stutzman M L, et al.The Effect of Heat Treatments and Coatings on theOutgassing Rate of Stainless Steel Chambers [J]. Journalof Vacuum Science & Technology A Vacuum Surfaces& Films,2014,32(2):021604-021604-8.

共引文献11

同被引文献7

引证文献1

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部