摘要
为测量高能激光传输系统中大口径高反射率光学元件的反射率,设计了一种大口径光学元件二维扫描的精密测量系统。介绍了该系统的结构及其工作原理,分析了影响系统测量精度的因素,从理论上分析了扫描系统的系统误差对测量精度的影响,结果表明在垂直于光束传播方向上,水平偏差在0.29 mm时,测量误差在10^(-6)量级;腔长的变化量较小时,可通过对衰荡腔腔镜的调节,实现对旋转轴偏差的补偿及对系统的精细调节。通过拟合处理光强与时间的数据得到对应的一次指数函数拟合曲线,并通过计算得到衰荡时间和反射率,经过对比分析可知,该误差分析方法能比较有效地测量腔镜的反射率,并能减小实验数据本身带来的误差。
In order to measure the reflectivity of large-aperture and high-reflectivity optical elements in high energy laser transmission system, a precision measurement system for two-dimensional scanning of largeaperture optical elements was designed. The structure and working principle of the system were introduced, the factors affecting the measurement accuracy of the system were analyzed, and the influence of systematic error of the scanning system on the measurement accuracy was theoretically analyzed. The results show that the measurement error is 10^(-6) magnitude when the horizontal deviation is 0.29 mm perpendicular to the beam propagation direction. When the variation of cavity length is small, the rotation axis deviation can be compensated and the system can be fine adjusted by adjusting the ring-down cavity mirror. By fitting the data of light intensity and time, the corresponding first-order exponential function fitting curve was obtained, and the ring-down time as well as the reflectivity was obtained by calculation. Through contrast analysis, this kind of error analysis method can more effectively measure the reflectivity of cavity mirrors and can reduce the error brought by the experimental data itself.
作者
张彪
张金玉
吉晓
段园园
吴磊
黎高平
于东钰
阴万宏
ZHANG Biao;ZHANG Jinyu;JI Xiao;DUAN Yuanyuan;WU Lei;LI Gaoping;YU Dongyu;YIN Wanhong(The First Scale Optical Metrology Station of the Science,Technology and Industry for National Defense,Xi'an Institute of Applied Optics,Xi'an 710065,China;College of Optical and Electronic Science Technology,China Jiliang University,Hangzhou 310018,China)
出处
《应用光学》
CAS
北大核心
2023年第2期380-385,共6页
Journal of Applied Optics
基金
技术基础科研项目(JSJL2020208A003)
测试仪器项目(2006ZCGG0103-2)。
关键词
光学测量
超高反射率
光腔衰荡
测量精度
大口径
optical measurement
ultra-high reflectivity
optical cavity ring-down
measurement accuracy
large aperture
