摘要
采用常压干燥法,在Ti、SiO_(2)、GaN、Al和Si 5种衬底上制备二氧化硅气凝胶薄膜,研究衬底类型对二氧化硅气凝胶薄膜形貌的影响。通过XPS法检测二氧化硅气凝胶薄膜与衬底之间的界面结合。采用椭偏仪结合反射光谱拟合的方法对二氧化硅气凝胶薄膜的折射率进行测量。通过原子力显微镜和场发射扫描电镜对二氧化硅气凝胶薄膜的表面及截面形貌进行观测。结果表明,二氧化硅气凝胶薄膜的形成会导致Al衬底表面Al-O中心峰产生0.07 eV的偏离,以及Ti衬底表面Ti 2p_(3/2)中心峰0.43 eV的偏离。这表明Al衬底和Ti衬底与二氧化硅气凝胶薄膜之间形成了某种化学键。同时,折射指数测量显示,Ti衬底表面形成的二氧化硅气凝胶薄膜折射指数最低(1.17),平均孔隙率(63.8%)比硅衬底表面形成的二氧化硅气凝胶薄膜孔隙率(57.2%)要高。衬底类型对二氧化硅气凝胶薄膜形貌的影响与不同衬底的亲水性有关。由于Ti衬底亲水性最佳,更多的颗粒在Ti衬底表面形核和长大,导致其上制备的二氧化硅气凝胶薄膜具有更大的表面粗糙度,以及更大的颗粒和孔径。
Silica aerogel films were fabricated on five substrates, i.e., Ti, SiO_(2), GaN, Al and Si, by ambient pressure dry method. The influence of the substrate type on the morphology of the silica aerogel films was investigated. X-ray photoelectron spectroscopy(XPS) was used to observe the interfacial bonding states between silica aerogel films and the substrates. The refractive index of each film was measured by fitting the reflectance spectrum using spectroscopic ellipsometry. The morphology and cross-section of each film were observed by atomic force microscope and field emission scanning electron microscope. Results show that the binding energy offset of 0.07 eV of the Al-O center peak and 0.43 eV of the Ti 2p_(3/2)center peak are caused by the fabrication of the silica aerogel films, which suggests the formation of chemical bonds between the substrates and the silica aerogel films. The silica aerogel film prepared on the Ti substrate has the lowest refractive index of the films(1.17), and an approximate average porosity of 63.8% which is higher than that of the film on the Si substrate(57.2%). Effect of substrate type on the morphology of silica aerogel film is attributed to hydrophilicity. Owing to the best hydrophilicity of Ti substrate, more particles are accumulated on the Ti substrate to nucleate and grow, producing a silica aerogel film with larger surface roughness, particles and pores than other films.
作者
郑伟
王垚
何思亮
向讯
崔银花
胡川
Zheng Wei;Wang Yao;He Siliang;Xiang Xun;Cui Yinhua;Hu Chuan(Institute of Semiconductors,Guangdong Academy of Sciences,Guangzhou 510650,China;School of Mechanical and Electrical Engineering,Guilin University of Electronic Technology,Guilin 541004,China)
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2023年第2期493-501,共9页
Rare Metal Materials and Engineering
基金
Key-Area Research and Development Program of Guangdong Province(2020B0101320001)
Project of Special Fund for Action to Build the First-Class Domestic Research Institution of Guangdong Academy of Sciences(2021GDASYL-20210103080,2021GDASYL-20210103078)
Science and Technology Program Project of Guangzhou(202102020404)。
关键词
二氧化硅气凝胶薄膜
衬底类型
亲水性
分子极性
颗粒形核与长大
silica aerogel film
substrate type
hydrophilicity
molecular polarity
particle nucleation and growth
