摘要
基于工农业发展对微型近红外光谱仪的需求,对用于微型近红外光谱仪的电磁式微光机电系统(MOEMS)扫描光栅微镜的驱动系统进行优化设计,从而解决扫描光栅微镜驱动信号大、扫描角度小等问题。通过对构成其驱动系统的线圈匝数、线圈间距等参数进行仿真分析,得到最优参数:驱动线圈在内圈、角传感线圈在外圈且以差分形式排布在驱动线圈两侧,驱动线圈匝数为21匝,角传感线圈匝数为2匝,线圈间距为0.020 mm。实验结果表明:驱动频率为604.4 Hz,驱动线圈电阻为114.537Ω,两端角传感线圈电阻分别为404.820和404.970Ω;驱动电流为5 mA时,偏转半角达到6.321°,机械偏转角达到12.642°,并且角传感器灵敏度为1.4425 mV/°。因此,电磁式MOEMS扫描光栅微镜具有驱动信号小、偏转角度大和灵敏度高的特点。研究结果对于扩大近红外光谱仪的光谱检测范围以及提升检测精度具有实际应用价值。
Based on the demand for micro near-infrared spectrometer in the development of industry and agriculture,the driving system of electromagnetic micro-optical electromechanical system(MOEMS)scanning grating micromirror in micro near-infrared spectrometer was optimized and designed to solve the problems of large driving signal and small scanning angle of the scanning grating micromirror.The optimal parameters were obtained by simulating the number of coil turns and spacing between coils in the driving system.The driving coil is in the inner circle,and the angle sensing coil is in the outer circle and is arranged on both sides of the driving coil in differential form.The number of turns of the driving coil is 21,the number of turns of the angle sensing coil is 2,and the coil spacing is 0.020 mm.The experimental results show that the driving frequency is 604.4 Hz,the driving coil resistance is 114.537Ω,and the sensing coil resistances at both sides are 404.820 and 404.970Ω,respectively.When the driving current is 5 mA,the deflection half-angle reaches 6.321°,the mechanical deflection angle reaches 12.642°and the sensitivity of the angle sensor is 1.4425 mV/°.Therefore,the electromagnetic MOEMS scanning grating micromirror has the features of small driving signal,large deflection angle and high sensitivity.The research results have practical application value for expanding the spectral detection range and improving detection accuracy of the near-infrared spectrometer.
作者
尹欣慧
顾雯雯
张青莲
Yin Xinhui;Gu Wenwen;Zhang Qinglian(College of Engineering and Technology,Southwest University,Chongqing 400715,China)
出处
《微纳电子技术》
CAS
北大核心
2023年第2期251-258,共8页
Micronanoelectronic Technology
基金
国家重点研发计划项目(2018YFF01011200)。
关键词
微光机电系统(MOEMS)
扫描光栅微镜
角传感器
驱动线圈
偏转角
灵敏度
micro-optical electromechanical system(MOEMS)
scanning grating micromirror
angle sensor
driving coil
deflection angle
sensitivity
