摘要
SEMI标准是一项国际通用的半导体行业标准,为研究SEMI标准在半导体制造设备中的应用情况,介绍了SEMI S2半导体设备安全准则、SEMI F47半导体设备电压暂降抗扰度标准并说明了标准的实际应用。分析了SEMI S23半导体设备能源、电力和原料的使用效率标准、SECS/GEM通讯标准及其研究应用现状;提出了我国半导体产业的快速发展需要加大SEMI标准的普及应用。
As semiconductor industry standard,SEMI standard is international standard.To discuss the application of SEMI standard in semiconductor manufacturing equipment,SEMI S2 semiconductor equipment safety guideline and SEMI F47 voltage sag immunity standard including its practical application are introduced.SEMI S23 energy efficiency standard and SECS/GEM communication standard along with its status of research are analyzed.It is proposed that developing Chinese Semiconductor Industry rapidly requires to enhance the application and popularization of SEMI standard.
作者
韦薇
林煦呐
张帅
谢琼
杨师
WEI Wei;LIN Xuna;ZHANG Shuai;XIE Qiong;YANG Shi(Cetc Electronics Equipment Group Co.,Ltd.,Beijing 100176,China;The 45^(th)Research Institute of CETC,Beijing 100176,China)
出处
《电子工业专用设备》
2023年第2期58-63,共6页
Equipment for Electronic Products Manufacturing
