摘要
低真空扫描电子显微镜对含水、含气以及不导电样品等的表征方面有着重要应用。国仪量子公司团队基于电子轨迹追踪模拟和粒子碰撞蒙特卡洛模拟,对低真空信号探测器的工作过程进行仿真和实测,分析了探测器在不同位置和气压大小对收集效率的影响。根据模型所预测的探测电流的大致范围同实测探测电流较为一致。同时仿真分析的结果表明,空间中不同区域的放电强度有较大区别,局部区域的雪崩倍增剧烈程度与该区域的电场强度成正相关。这对探测器的形状和位置布局设计具有显著的指导意义。
Scanning electron microscope(SEM)operated under the mode of low vacuum has an important application on the characterization of samples with water,gas and non-conductivity.Based on the simulations of electron trajectory tracking and particle collision Monte Carlo,Chinainstru&Quantumtech Company measured the working process of signal detector under low vacuum,and they analyzed the influence of different position and pressure on the collection efficiency.The result show that the estimated range of detection current predicted by the model is consistent with the data of measured detection current.Meanwhile,simulation result show that the intensities of discharge are quite different in different areas.The intensity of avalanche multiplication in local areas is positively correlated with the intensity of electric field in this area.This work provides an significant guidance for the shape and position layout design of the detector.
作者
陈禹滔
阴达
郑传懋
徐龙泉
卢志钢
曹峰
秦熙
CHEN Yu-tao;YIN Da;ZHENG Chuan-mao;XU Long-quan;LU Zhi-gang;CAO Feng;QIN Xi(l.Chinainstru&Quantumtech(Hefei)Co.Ltd.,Hefei Anhui 230031;University of Science and Technology of China,Department of Modern Physics,Hefei Anhui 230031,China)
出处
《电子显微学报》
CAS
CSCD
北大核心
2023年第2期208-215,共8页
Journal of Chinese Electron Microscopy Society
关键词
扫描电子显微镜
低真空探测器
带电粒子追踪
蒙特卡洛模拟
scanning electron microscope
low vacuum detector
charged particle tracking
Monte Carlo simulation
