摘要
A novel microvibration hammerhead consists of a piezoelectric actuator and a double cross-shape compliant mechanism(DCCM)is presented in this paper.The output force of the piezoelectric actuator can be detected in real time by an insideinstalled pressure sensor.A theoretical model including the stiffness,first natural frequency,and stress of the DCCM and the displacement output of the piezoelectric actuator are established,and then they are further analyzed using the finite element analysis method.The effects of the beam thickness on the static and dynamic properties are deeply analyzed and compared.A prototype micro hammering system is constructed by integrating the microvibration hammerhead assembly and controlling system.Various experiments are also carried out to verify the basic performance of the micro hammering system.
基金
supported by“National Natural Science Foundation of China(No.52205138)”
“the Fundamental Research Funds for the Central Universities,CAUC(No.3122019095)”
Science and Technology Planning Project of Tianjin Science and Technology Bureau,China(No.KJZ40420220150)
Natural Science Foundation of Tianjin,China(No.21JCQNJC00860).
